EE5171: Microelectronic Fabrication

3 CreditsGoal 10 - People/EnvironmentGoal 6 - Hum: Arts/Lit/PhilOnline Available

Fabrication of microelectronic devices. Silicon integrated circuits, GaAs devices. Lithography, oxidation, diffusion. Process integration of various technologies, including CMOS, double poly bipolar, and GaAs MESFET. prereq: CSE grad student or dept consent

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