EE5171: Microelectronic Fabrication

3 Credits

Fabrication of microelectronic devices. Silicon integrated circuits, GaAs devices. Lithography, oxidation, diffusion. Process integration of various technologies, including CMOS, double poly bipolar, and GaAs MESFET. prereq: CSE grad student or dept consent

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A- Average (3.506)Most Common: A (44%)

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168 students
WFDCBA

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    /6

    Recommend

  • 5.13

    /6

    Effort

  • 5.45

    /6

    Understanding

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    /6

    Interesting

  • 5.23

    /6

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