ME8254: Fundamentals of Microelectromechanical Systems (MEMS)
4 CreditsField StudyOnline Available
Major classes, components, and applications of MEMS. Principles behind operation of MEMS devices/ systems. Standard microfabrication techniques. Unique requirements, environments, and applications of MEMS. Students apply microfabrication techniques/applications to design/manufacture of a MEMS device or microsystem.